• 专利附录
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  • 权利要求
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    • 专利摘要:
    The device for the detection and characterization of electronic spins in a sample (201) comprises an electromagnetic micro-resonator (202) having a resonance frequency ωr in the microwave domain and a quality factor Q and in which is inserted the sample (201); a device for creating a magnetic field B0 in the sample (201) to resonate with the resonant frequency ωr a spin transition frequency ωs, such that ωS = γB0, where y is a gyromagnetic spin factor; a spin detection device receiving signals from the electromagnetic micro-resonator (202) associated with the sample (201) and comprising at least one low-noise amplifier operating at a temperature of between 1 and 10 K and a series of amplifiers and a demodulator operating at room temperature. The electromagnetic micro-resonator (202) is made of superconducting metal and is made at the nanoscale comprising an active zone consisting of a substantially parallelepipedic constriction (220), with a thickness of between 8 and 30 nm, a width of between 10 and 10. and 500 nm and a length of between 100 and 5000 nm. The device has improved sensitivity and allows the analysis of samples of very small size.
    公开号:FR3033413A1
    申请号:FR1551786
    申请日:2015-03-03
    公开日:2016-09-09
    发明作者:Patrice Bertet；Klaus Moelmer
    申请人:Commissariat a lEnergie Atomique CEA；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
    IPC主号:
    专利说明:

    [0001] FIELD OF THE INVENTION The present invention relates to a device and a method for performing electron spin resonance spectroscopy (abbreviated to ESR as "Electronic Spin Resonance") with increased sensitivity compared to the state of the art. art. ESR spectroscopy has applications in particular in structural biology, solid state physics and archeology. PRIOR ART Current spectrometers have a sensitivity that allows them to typically detect 109 spins in one second of integration time. The purpose of an ESR spectrometer 10 is to detect and characterize electronic spins in a given sample 1. For this, the sample 1 is inserted into an electromagnetic resonator 2 having a resonance frequency wr in the microwave domain ( typically 5 to 10GHz), and Q quality factor (see Figure 1). A magnetic field BO is applied to the sample 1 in the direction of the arrow 3 by a coil or other devices for creating a magnetic field, not shown, in order to bring the spin transition frequency (given by where y is the gyromagnetic spin factor) resonant with the resonance frequency wr. This magnetic resonance is detected by means of a microwave signal which is injected into the cavity at the frequency wr by a device 4 and recovered at the output of the sample 1 by a device 5 to be amplified by an amplifier device 6. The transmission T of this signal is reduced when cos = wr, because the spins then absorb this microwave signal, which is manifested by the appearance of resonance sag on the curve T (B0). The frequency and width of the deflections (also called "dips"), as well as their relative amplitude, make it possible to extract a set of information on the sample 1. This mode of use of a spectrometer is called "spectroscopy. of CW spins "(according to the English expression" Continuous Wave-EPR "). Another widely used mode of use (called "pulsed EPR") which implements a device such as that of FIG. 1 consists in using sequences of short microwave pulses which exert a rotation of the spin of a Rabi angle well defined.
    [0002] One of the most used sequences is called spin echo. It consists in applying a first pulse exerting a rotation of angle n / 2 on the spins, followed after a duration i of a second pulse exerting a rotation of angle Tc. Spins satisfying the resonance condition ws = wr then emit an echo signal at time 2-c.
    [0003] The dependence of the amplitude of this echo signal as a function of the parameters (magnetic field, angle, delay -c between the pulses, ...) contains all the information that can be extracted from the sample. The detection of the spin echo signal is therefore essential and constitutes the keystone of the electronic paramagnetic resonance.
    [0004] The maximum power P emitted during a spin echo in the cable connecting the resonator 1 to the detection chain 6 is given by a simple formula: P = horN2 g2 IK, where N is the number of spins contained in the sample, g being the "coupling constant" of a spin 3033413 3 at the microwave field of the cavity, and x = wr / Q the damping rate of the field in the microwave resonator. The duration of the echo pulse depends on the sample, but is given approximately by the "free induction time" T2 *.
    [0005] The sensitivity of the spectrometer can then be quantified by the minimum number of Nmin spins that can be detected with a signal-on-noise ratio of 1 in a spin echo. This number clearly depends on the amount of noise added by the first amplifier of the microwave detection chain 6 characterized by its noise temperature TN. The degradation of the signal-to-noise ratio during the amplification is given by the number of photons of noise added by the amplifier given by n -11 (efia'rlug -1). The usual microwave amplifiers all operate within the limit where kTN "winter so that n kTN I hcor 15 The minimum number of spins that can be detected by the spectrometer in a spin echo is then calculated by equalizing the number of photons emitted by the spins during an echo (T; P / hor) to the number of noise photons emitted during T2 * in a bandwidth 1 / T2 * (that is to say n), which implies that 20 coth hcor ) 1 nK 2kT g T; (the first term in coth being due to the equilibrium polarization of the spins at temperature T). In a usual spectrometer, the resonator 2 is a metal box that contains the sample 1, and the microwave field inside the resonator 2 occupies a volume of about X3, where X is the wavelength at the frequency cor. This results in a typical coupling constant g = 23t x 5mHz. Amplifier 6 at room temperature adds about n = 103 photons of noise. The quality factor is typically 2033413 2000. The spin polarization factor at room temperature is cothwr 103. This leads to a sensitivity of Nmin .4013 spins 2kT detectable in a spin echo for a conventional spectrometer at room temperature.
    [0006] Recently, new types of spectrometers have been developed, based on micro-resonators 102. These are microwave resonators made from thin metal films (see Figure 2). The mode volume can then be much smaller than X.3 so that the coupling constant can be wider, reaching g = 2n x 1 at 20 Hz. Micro-resonators 102 have been made with a so-called geometry. Loop-gap with thin films of normal metal (see for example the article by Y. Twig, E. Suhovoy, A. Blank, Rev. Sci Inst 81, 104703 (2010)).
    [0007] According to another embodiment, micro-resonators 102 have been made in superconducting metal coplanar waveguide geometry (see the example of FIG. 2), as described for example in the article by H. Malissa , DI Schuster, AM Tyryshkin, AA Houck, SA Lyon, Rev. of Sci. Instr. 84, 025116 (2013).
    [0008] By working at 4K to increase the spin polarization, and also using better amplifiers cooled to 4K, for which n = 10 to 20 photons of noise are obtained, the sensitivity has been increased to a record value of N .107 spins in a spin echo, which represents the highest sensitivity published in the literature to date (see the article by AJ Sigillito et al., Appl Phys. Lett. 104, 222407 (2014) However, it is desirable to be able to further improve such sensitivity.
    [0009] SUMMARY OF THE INVENTION The object of the invention is to propose a method and a device for gaining up to thirteen orders of magnitude compared to the usual ESR spectrometers, and up to seven orders of magnitude. compared to the state of the art, which would thus allow to detect a single spin in about one second of measurement. Applications opened by the invention include ESR spectroscopy of a single protein, a single biological cell, as well as the realization of a quantum computer based on spins in the solid. These objects are achieved by a very high sensitivity spin resonance spectroscopy device for the detection and characterization of electronic spins in a given sample, comprising an electromagnetic micro-resonator having a wr resonance frequency in the field. microwave and a quality factor Q and in which is inserted the sample, a device for creating a magnetic field BO in the sample to resonate with the resonant frequency wr a cos transition frequency of the spins, such that ws = yBO, where y is a gyromagnetic spin factor; a spin detection device 20 receiving signals from the electromagnetic micro-resonator with which the sample is associated and comprising at least one low-noise amplifier operating at a temperature of between 1 and 10 K, a series of amplifiers and a working demodulator at ambient temperature, characterized in that the electromagnetic micro-resonator is made of a superconducting metal and is made on a nanometric scale comprising an active zone constituted by a substantially parallelepipedic constriction with a thickness of between 8 and 30 nm, a width of between 10 and 500 nm and a length between 100 and 5000 nm.
    [0010] The micro-resonator may be preferably made of niobium, aluminum, NbN, NbTiN or TiN. According to a particular embodiment, the device comprises a Josephson parametric amplifier arranged upstream of the low-noise amplifier 5 and operating at temperatures T satisfying T shcor I kB, where h is the reduced Planck constant and kB is the constant of Boltzmann (whose value is kg = 1.38 J / K = 1.38 x 10-23 nekgs-2K-1). If the working frequency is about cor / It = 5 to 10 GHz, then the correct working temperature will be in the range of 10 to 200 mK.
    [0011] If the working frequency is higher cor / 23T = 20 to 40 GHz, it will be possible to work at a temperature of about 1 to 3K, which can be achieved without using dilution cryogenics. In this case, according to an advantageous embodiment, the device further comprises an additional Josephson parametric amplifier 15 operating at temperatures T satisfying T shcor I kB, and arranged in such a way that its output is connected to the input of the microphone. resonator to produce a "compressed vacuum" which is a quantum state of the electromagnetic field in which the noise on one of the two quadratures is reduced relative to the quantum noise of the void.
    [0012] The spin detection device may be of the continuous wave type and then comprises a device for injecting a microwave signal at the frequency cor into the electromagnetic micro-resonator. According to one possible alternative, the spin detection device is of the pulsed-wave type and comprises a device for injecting short microwave pulse sequences at the frequency wr in the electromagnetic micro-resonator to exert a rotation of the spin of a well-defined Rabi angle. The invention also relates to a very high sensitivity spin resonance spectroscopy method, for the detection and the characterization of electronic spins in a given sample, comprising a step of producing an electromagnetic micro-resonator, having a resonance frequency wr in the microwave domain and a Q quality factor and to which the sample is associated; A step of creating a magnetic field BO in the sample for resonating with the resonant frequency wr a ws transition frequency ws, such that ws = yBO, where y is a gyromagnetic spin factor; a spin detecting step receiving signals from the electromagnetic micro-resonator associated with the sample using at least one low-noise amplifier operating at a temperature of between 1 and 10 K, as well as a series of amplifiers and a demodulator operating at room temperature, characterized in that in the step of producing the electromagnetic micro-resonator a superconducting electromagnetic micro-resonator is chosen which is produced on the nanometric scale and comprises an active zone constituted by a constriction essentially parallelepipedic whose dimensions are: a thickness of 8 to 30 nm, a width of 10 to 500 nm and a length of between 100 and 5000 nm.
    [0013] According to a particular embodiment, in the spin detection step, a low-noise amplifier is provided upstream of a Josephson parametric amplifier operating at temperatures T satisfying T shcor 1 kB, where i is the Planck constant. reduced and kB is the Boltzmann constant (whose value is kB = 1.38 J / K = 1.38 x 10-23 m2kgs-2K-1).
    [0014] If the working frequency is about wr / 2n = 5 to 10 GHz, then the proper working temperature will be in the range of 10 to 200 mK. If the working frequency is higher wr / 2n = 20 to 40 GHz, it will be possible to work at a temperature of about 1 to 3 K, which can be reached without using dilution cryogenics.
    [0015] In this case where a Josephson parametric amplifier is arranged upstream of the low-noise amplifier, according to an advantageous embodiment, in the step of producing an electromagnetic micro-resonator, one has an additional Josephson parametric amplifier operating at temperatures T satisfying T shcor I kB, such that its output is connected to the input of the micro-resonator to produce a "compressed vacuum" which is a quantum state of the electromagnetic field in which the noise on one of the two quadratures is reduced compared to the quantum noise of the void. According to the present invention, several features each contribute to improving the sensitivity of an ESR spectrometer while preserving the basic principle. With all the innovations proposed here, the sensitivity of an ESR spectrometer can reach a minimum number of detected spins in an Nmin 1 echo, ie a gain of thirteen orders of magnitude compared to a conventional spectrometer. and seven orders of magnitude compared to the best value published to date, corresponding to a measuring time respectively 1026 and 1014 times shorter.
    [0016] BRIEF DESCRIPTION OF THE DRAWINGS Other features and advantages of the invention will emerge from the following description of particular embodiments given by way of non-limiting example with reference to the accompanying drawings, in which: FIG. FIG. 2 is a schematic perspective view showing an example of an ESR spectrometer based on a coplanar micro-resonator. FIG. 3 is a schematic perspective view of a nano-ray spectrometer. FIG. ESR spectroscopy resonator according to one aspect of the invention, FIG. 3A is an enlarged view of a portion of the nanoresonator of FIG. 3 showing a constriction receiving a nanometer sample, FIG. 4 is a diagram of a spectrometer. ESR based on a Josephson parametric amplifier according to a second aspect of the invention, and FIG. 5 is a diagram of a particular embodiment constituting an improvement of the ESR spectrometer of FIG. 4 to produce a non-noisy echo. DETAILED DESCRIPTION OF PARTICULAR EMBODIMENTS OF THE INVENTION According to a first aspect of the invention, which is shown in FIG. 3, a micro-resonator 202 is used in an ESR spectrometer which is at the nanometric scale. It is, within the inductive part of a micro-resonator (for example the micro-resonator 202 in coplanar geometry shown in FIG. 3), to introduce a small zone 220 where the dimensions of the resonator become much lower, typically between 10 and 500 nm (see Figures 3 and 3A). Such constriction 220 is achievable using standard electronic lithography techniques. An "active zone" of typical dimensions (100 nm) 3 is thus obtained in which the spins present will be coupled with a coupling constant of up to 1 to 10 kHz, about two orders of magnitude greater than what has been achieved. realized until now. FIG. 3 shows a substrate 225 on which plate-like metal layers 221 and 222 corresponding to the capacitive portion of the resonator of the ESR spectrometer of FIG. 1, which also allows the coupling to the waveguides, are deposited. measurement (not shown). The exact geometry of this capacitive part can be adapted to that shown in the diagram, for example an interdigitated capacitance is usable. The metal layers 221 and 222 are aligned in a direction 203 corresponding to the direction of the applied magnetic field BO. The metal layers 221 and 222 are interconnected by narrower conductive tracks 223, 224 aligned with each other along the direction 203 and joined by an even narrower constriction portion 220 on which a sample 201 to be analyzed is disposed (see FIGS. Figures 3 and 3A). The constriction 220 of parallelepipedal shape may have, for example, a section of 20 nm × 20 nm and a length of 200 nm. More generally, the substantially parallelepipedic constriction 220 has a thickness of 8 to 30 nm, a width of 10 to 500 nm, and a length of between 100 and 5000 nm. More particularly, the dimensions of the constriction 220 and those of the sample 201 are adapted to be compatible with each other. In particular, this type of nano-resonator 202 is well suited for measuring samples of typical size -100 nm, such as biological samples, where the amount of available material is very small. The resonator 202 must imperatively be made of superconducting metal (for example Niobium or NbN or NbTiN below 5 K, aluminum below 200 mK, or TiN en 3033413 below 2 K ) so that its quality factor Q is high enough for effective detection (Q being preferably chosen between 103 and 105). The other elements of the ESR spectrometer may be such as those described above. In particular, the electromagnetic micro-resonator 202, having a resonance frequency wr in the microwave domain and a Q quality factor and in which is inserted the sample 201 and a device for creating a magnetic field BO in the 201 to resonate with the resonant frequency wr a ws spin transition frequency, such that ws = yBO, where y is a gyromagnetic spin factor, the ESR spectrometer according to the invention comprises a detection device of spins receiving signals from the electromagnetic micro-resonator 202 and the sample 201.
    [0017] The spin detecting device comprises at least one low-noise amplifier 303 operating at a temperature of between 1 and 10K, a series of amplifiers 304 and a demodulator 305 operating at ambient temperature, as shown in FIG. 4. It will be described Referring now to FIG. 4, a second aspect of the invention, which also contributes to increasing the detection sensitivity, is therefore advantageously implemented with the nanoresonator 202 described above with reference to FIG. increase the sensitivity of the latter, but could also be implemented independently of the nano-resonator 202 described above, that is to say could be implemented with a resonator or a conventional micro-resonator without constriction and able to receive a sample of arbitrary size. According to this other aspect of the invention, a Josephson parametric amplifier is used which is a type of microwave amplifier 3033413 12 recently developed for quantum information applications, and whose major interest is to have the best noise performance possible since it reaches the limit of what is allowed by quantum physics, that is to say: n = 0.5 to 1.
    [0018] Amplifiers known as Josephson Parametric Amplifiers (JPAs) are made from superconducting circuits containing Josephson junctions. They typically operate at temperatures T such that T shcor I kB, where h is the reduced Planck constant and ka is the Boltzmann constant (whose value is kB = 1.38 10 J / K = 1.38 x 10- 23 m2kgs-2K-1). This corresponds to temperatures of 10 to 200 mK for frequencies of 5 to 10 GHz, and temperatures of 1 to 3 K for frequencies of 20 to 40 GHz. They have been used in various experiments, but not for high sensitivity magnetic resonance measurements.
    [0019] Reference can be made in particular to the article by M.A. Castellanos-Beltran, K.W. Lehnert, Appl. Phys. Lett. 91, 083509 (2007) and N. Bergeal et al., Nature 465, 64 (2010). According to the invention, it has been found that for high sensitivity magnetic resonance measurements, it is advantageous to use a JPA in the "degenerate" regime, where a single quadrature is amplified without any noise added by the amplifier, by adjusting the amplifier to amplify the quadrature on which the spin echo is emitted. In this regime, the only noise limiting the sensitivity of the measurement is the quantum noise of the vacuum which corresponds to n = 0.5.
    [0020] Referring to FIG. 4, it can be seen that, from an assembly 301 comprising a resonator and a sample, which may advantageously consist of a resonator 202 and a sample 201 as previously described with reference to FIGS. FIGS. 3 and 3A to obtain a maximum sensitivity, but could also be realized in a conventional manner without the constriction 220 of the resonator 202, the signals induced in the resonator subjected to a magnetic field BO as indicated above are applied to a parametric amplifier Josephson 302 (JPA amplifier) placed, as the assembly 301, in an environment 5 whose temperature is that which is adapted to the amplifier 302 as indicated above. The output of the amplifier JPA 302 is connected to the input of a low-noise amplifier 303, itself placed in an environment at a temperature between 1 and 10 K. The output of the low-noise amplifier 303 is 10 connected to the input of a series of amplifiers 304 associated with a demodulator 305 using a local oscillator. The set of amplifiers 304 and the demodulator 305 are set at room temperature, for example of the order of 300 K. FIG. 5 illustrates an improvement of the embodiment of FIG. embodiment of Figure 5, a device is used generating a compressed vacuum (also called "empty squeezed") to further increase by a factor up to an order of magnitude the sensitivity of the spectrometer. Squeezed vacuum is a quantum state of the electromagnetic field in which the noise on one of the two quadratures is reduced by a factor S relative to the quantum noise of the vacuum, that is to say that the number of photons of added noise becomes n = 0.5 / S. In practice, S = 10 to 100 can be achieved. The squeezed quadrature is chosen so that it corresponds to that on which the spin echo is emitted. The sensitivity of the spectrometer then increases further by a factor - / S, that is, potentially by an order of magnitude more. The squeezed vacuum is generated by an additional degenerate type JPA amplifier 306, positioned such that its output is connected to the input of the set 301 including the resonator and the sample in the spectrometer (see FIG. 5). This improvement is useful in the case where the echo signal is then amplified by a JPA type amplifier 302 at the quantum limit as indicated above with reference to FIG. 4. The non-noisy echo obtained at the output of the JPA amplifier 302 at the quantum limit is then amplified by the amplifiers 303 and 304 and demodulated by the demodulator 305 as shown in FIG. 4 and these elements have not been shown again in FIG. 5.
    [0021] By combining the three embodiments of FIGS. 3 to 5, we obtain (for g = 2n x 5kHz, T = 10mK, S = 100, Q = 105): Nmin = 0.5. This means that it becomes possible to perform EPR spectroscopy measurements on any single spin electron spin.
    [0022] The object of the invention is therefore to increase very significantly the sensitivity of an electronic paramagnetic resonance (EPR) detection chain (ESR) which makes it possible to measure the magnetic spin moment of electrons of the electron spin resonance (ESR). a sample of material to be tested.
    [0023] Sensitivity amounts to quantifying the number of detected electron spins, and is measured in either spins / VHz (109 spinsh / Hz at 300 K for commercial devices) or in number of electronic spins detected in a single echo (typically 1013 spins at 300 K with commercial devices). It is pointed out that the experimental facilities evaluate this sensitivity in spin count for an echo, these two quantities being related by the repetition rate, which itself is fixed by the relaxation time in T1 spin energies which can depend on the type of spin. of spin considered. The best sensitivity achieved in the laboratory is N1echoz 5x107 spins at 1 or 2 K.
    [0024] In practice, this occurs in superconducting planar resonators, where a waveguide confines a planar resonator so as to constitute a resonator of very high quality coefficient (Q.sub.1404). The output of the planar resonator is usually applied directly to a low-noise amplifier cooled to a temperature of between 1 and 10 K, such as the amplifier 303 of FIG. 4. The invention in the embodiment of FIG. 4 consists in introducing between a the assembly 301 formed by the resonator and the sample and on the other hand the amplifier 303 a device from quantum physics, namely the amplifier JPA 302 which is an "amplifier with the quantum limit". "Quantum limit amplifier" has an extremely low noise level, and improves the signal-to-noise ratio of about 10. The invention takes into account all possible types of superconducting resonators s, a priori all forms of which are suitable, although a preferred embodiment is that described with reference to FIGS. 3 and 3A. In the embodiment of FIG. 5, on the opposite side to the output of the planar resonator is added a second "quantum limit amplifier" (JPA amplifier 306 of FIG. 5), the operation of which is a little different but which finally also leads to reducing noise by generating a state of "compressed vacuum" at its output. Finally, the quality coefficient of the cavity is also a determining point.
    [0025] The core of the invention consists of a planar superconducting microwave resonator for measuring a set of spins coupled to the oscillating magnetic field of the resonator. The resonator may be made of a material allowing the application of magnetic fields up to 1 Tesla while preserving a high quality factor (between 104 and 105). In summary, in order to increase the sensitivity of this spectrometer (i.e., the minimum number of spins that can be detected in one second), the following measures are recommended according to the invention: The use of a microwave amplifier at the quantum limit 302 for amplifying the spin echo signal. This increases the signal-to-noise ratio by a factor of 10 to 50, and thus the sensitivity of the spectrometer, i.e., the minimum number of spins that can be detected. At a temperature of 10mK (reached temperature in a commercially diluted cryostat), the sensitivity reached is estimated at 103 spins in a single echo, which represents a gain of four orders of magnitude compared to the best published performances.
    [0026] In this case, the sensitivity is further increased with illumination of the spectrometer with a squeezed vacuum generated by a parametric amplifier 306 at the input of the spectrometer. Squeezed vacuum reduces the noise on one of the quadrature of the microwave signal. By choosing the phase of this vacuum squeezed so that it coincides with the phase of the spin echo, the signal-to-noise ratio will be further increased by a factor which can be up to 10. Finally, to increase even more strongly the sensitivity, for samples 201 of very small size (of the order of 100 nm or 200 nm or less), it is possible to introduce a constriction 220 within the resonator 202, the most It is possible to achieve a sensitivity corresponding to the detection of a single spin in less than one second of acquisition time.
    权利要求:
    Claims (11)
    [0001]
    1. A very high sensitivity spin resonance spectroscopy device for the detection and characterization of electronic spins in a given sample (201), comprising an electromagnetic micro-resonator (202), having a frequency of resonance cor in the domain microwave and a quality factor Q and in which is inserted the sample (201), a device for creating a magnetic field BO in the sample (201) to resonate with the resonant frequency wr a frequency ws of spin transition, such that ws = yBO, where y is a gyromagnetic spin factor, a spin detection device receiving signals from the electromagnetic micro-resonator (202) associated with the sample (201) and comprising at least a low-noise amplifier (303) operating at a temperature between 1 and 10K, a series of amplifiers (304) and a demodulator (305) operating at ambient temperature, characterized characterized in that the electromagnetic micro-resonator (202) is of superconducting metal and is made at the nanoscale comprising an active zone consisting of a substantially parallelepipedic constriction (220) with a thickness of between 8 and 30 nm, a width between 10 and 500 nm and a length between 100 and 5000 nm.
    [0002]
    2. Device according to claim 1, characterized in that the micro-resonator (202) is made of niobium, aluminum, NbN, NbTiN or TiN.
    [0003]
    3. Device according to claim 1 or claim 2, characterized in that it further comprises a Josephson parametric amplifier (303) disposed upstream of said low-noise amplifier (302) and operating at temperatures T checking T s winter / kB where h is the reduced Planck constant and ks is the Boltzmann constant.
    [0004]
    4. Device according to claim 3, characterized in that it further comprises an additional Josephson parametric amplifier (306) operating at temperatures T s winter I kB and arranged so that its output is connected to the input of said micro-resonator (202) to produce a compressed vacuum which is a quantum state of the electromagnetic field in which noise on one of the two quadratures is reduced relative to the quantum noise of the void.
    [0005]
    5. Device according to any one of claims 1 to 4, characterized in that the spin detection device is of the continuous wave type and comprises a device for injecting a microwave signal at the frequency 15 cor in the electromagnetic resonator (202).
    [0006]
    6. Device according to any one of claims 1 to 4, characterized in that the spin detection device is of the pulsed-wave type and comprises a device for injecting microwave short pulse sequences at the same time. horn frequency in the electromagnetic micro-resonator (202) for spin rotation of a well-defined Rabi angle.
    [0007]
    7. A very high sensitivity spin resonance spectroscopy method for the detection and characterization of electronic spins in a given sample (201), comprising a step of producing an electromagnetic micro-resonator (202) having a resonance frequency cor in the microwave domain and Q quality factor and wherein is inserted the sample (201), a step of creating a magnetic field BO in the sample (201) to bring to resonance 3033413 19 with the resonance frequency wr a ws spin transition frequency, such that ws = yBO, where y is a gyromagnetic spin factor, a spin detection step receiving signals from the electromagnetic micro-resonator (202) with which is associated the sample using at least one low-noise amplifier (303) operating at a temperature between 1 and 10K, as well as a series of amplifiers (304) and a demodulator (305) operating at room temperature, characterized in that in the step of producing the electromagnetic micro-resonator (202), an electromagnetic micro-resonator of superconducting metal is chosen which is produced on the nanometric scale and comprises an active zone constituted by a constriction (202) essentially parallelepiped whose dimensions are: a thickness of 8 to 30 nm, a width of 10 to 500 nm, and a length of between 100 and 5000 nm. 15
    [0008]
    8. Method according to claim 7, characterized in that in the step of detecting spins, there is further upstream of said low-noise amplifier (303) a Josephson parametric amplifier (302) operating at temperatures T verifying T shcor I kB, where h is the reduced Planck constant and kB is the Boltzmann constant.
    [0009]
    9. A method according to claim 8, characterized in that in the step of producing an electromagnetic micro-resonator (202), there is an additional Josephson parametric amplifier (306) operating at temperatures T verifying T s hcor I kB , so that its output is connected to the input of said micro-resonator (202) to produce a compressed vacuum which is a quantum state of the electromagnetic field in which the noise on one of the two quadratures is reduced in relation to the quantum noise of the void. 3033413 20
    [0010]
    10. The method of claim 8 or claim 9, characterized in that the measurement frequencies are between 5 and 10 GHz and the temperature T is between 10 and 200 mK.
    [0011]
    11. The method of claim 8 or claim 9, characterized in that the measurement frequencies are between 20 and 40 GHz and the temperature T is between 1 and 3 K.
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    同族专利:
    公开号 | 公开日
    EP3265790A1|2018-01-10|
    WO2016139419A1|2016-09-09|
    US10422838B2|2019-09-24|
    US20180045795A1|2018-02-15|
    FR3033413B1|2017-03-24|
    EP3265790B1|2021-09-29|
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    优先权:
    申请号 | 申请日 | 专利标题
    FR1551786A|FR3033413B1|2015-03-03|2015-03-03|METHOD AND DEVICE FOR SPECTROSCOPY OF ELECTRONIC SPIN RESONANCE OF VERY HIGH SENSITIVITY|FR1551786A| FR3033413B1|2015-03-03|2015-03-03|METHOD AND DEVICE FOR SPECTROSCOPY OF ELECTRONIC SPIN RESONANCE OF VERY HIGH SENSITIVITY|
    US15/554,493| US10422838B2|2015-03-03|2016-03-02|Method and device for very high sensitivity electron spin resonance spectroscopy|
    PCT/FR2016/050467| WO2016139419A1|2015-03-03|2016-03-02|Method and device for very high sensitivity electron spin resonance spectroscopy|
    EP16712959.2A| EP3265790B1|2015-03-03|2016-03-02|Method and device for very high sensitivity electron spin resonance spectroscopy|
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